Физика Низких Температур: Том 43, Выпуск 7 (Июль 2017), c. 978-985 ( к оглавлению , назад )
Application and fabrication aspects of sub-micrometer-sized Josephson junctions
G. Oelsner1, U. Hübner1, S. Anders1, and E. Il'ichev1,2
1Leibniz Institute of Photonic Technology, P.O. Box 100239, Jena D-07702, Germany
2Novosibirsk State Technical University, 20 Karl Marx Ave., Novosibirsk 630092, Russia
Received March 2, 2017
We present two possible methods for the fabrication of sub-micron sized Josephson junctions, namely the shadow-evaporation technique and the cross-type technology. Their importance for the field of modern super-conducting technology is discussed. As examples we present measurement results of a two-qubit sample and a prototype of a microwave detector fabricated each by one of the described methods. We review potential applications of superconducting quantum circuits based on the developed methods.
PACS: 85.25.Cp Josephson devices;
Ключевые слова: sub-micro Josephson junctions, fabrication, superconducting qubits.
Published online: May 25, 2017